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So he "only" did metal deposition to make the interconnects? I haven't read the story, but I was thinking that there's no way you would handle some of the toxic
by geomark 5y ago
So he "only" did metal deposition to make the interconnects? I haven't read the story, but I was thinking that there's no way you would handle some of the toxic chemicals used for doping.
- wrycoder 5y agoThey are not really that toxic. You do have to have a chemistry background and use a fume hood and a process sink with acid neutralization capability, like you find in many chem labs. Good dopant choices would be phosphorus oxychloride and oxidized boron nitride wafers. As I recollect, he started with silicon wafers with an epitaxy layer. He then did the usual oxidations, diffusions, and metallization, along with all the photolithographic steps. No small feat!
- geomark 5y agoOk. I was never a process guy, but worked with some back in the day and they told me that one of their phosphorus sources was phosgene gas.
- wrycoder 5y agoSilane, phosphene, and diborane gases are used to form epitaxial layers on silicon wafers. Those are truly dangerous gases. However, a simple wafer process using the reagents I mentioned can produce very credible ICs, if one buys the epi wafers.