I imagine they do the disassembly and packaging in a clean room. (At least for now the technicians require air :D) Then the packages are vacuum pumped, sealed,

I imagine they do the disassembly and packaging in a clean room. (At least for now the technicians require air :D) Then the packages are vacuum pumped, sealed, then shipped. Then at the destination fab they are assembled again in a clean room. Yeah, I remember the articles about how insane the requirements are to protect masks: https://semiengineering.com/euv-pellicles-finally-ready/ https://semiengineering.com/euv-pellicles-finally-ready/