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I'm guessing, though not 100% certain, that EUV uses mirrors and not lenses, although still could be based on glass substrates.
by s0rce 5y ago
I'm guessing, though not 100% certain, that EUV uses mirrors and not lenses, although still could be based on glass substrates.
- frankchn 5y agoYeah EUV uses mirrors, which Zeiss also supplies: https://www.zeiss.com/semiconductor-manufacturing-technology/products-solutions/semiconductor-manufacturing-optics/lithography_13_5_nanometer0/starlith--euv-optics.html https://www.zeiss.com/semiconductor-manufacturing-technology.... There is an introductory PDF presentation from Zeiss about their product for EUVs: https://www.euvlitho.com/2019/P24.pdf https://www.euvlitho.com/2019/P24.pdf