There are a few candidates including X-rays. There’s still plenty of gains to be made in EUV technology before we get there though. https://en.m.wikipedia.org/

There are a few candidates including X-rays. There’s still plenty of gains to be made in EUV technology before we get there though. https://en.m.wikipedia.org/wiki/Next-generation_lithography https://en.m.wikipedia.org/wiki/Next-generation_lithography