> The wave length used was about an order of magnitude greater than the lirhography result; I have no recollection of how they claimed to handle that. https://

> The wave length used was about an order of magnitude greater than the lirhography result; I have no recollection of how they claimed to handle that. https://en.wikipedia.org/wiki/Multiple_patterning https://en.wikipedia.org/wiki/Multiple_patterning and it's pretty insane.