There are companies working on scaling e-beam lithography, which might be along the lines you're looking for [1] [2] [1] https://en.wikipedia.org/wiki/Electron

There are companies working on scaling e-beam lithography, which might be along the lines you're looking for [1] [2] [1] https://en.wikipedia.org/wiki/Electron-beam_lithography https://en.wikipedia.org/wiki/Electron-beam_lithography [2] http://www.multibeamcorp.com/ http://www.multibeamcorp.com/