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Trumpf doesn't make the EUV source it makes the CO2 laser which produces the plasma in Cymer's EUV source. Ushio does make a EUV source but thats not for manufa
by newswasboring 5y ago
Trumpf doesn't make the EUV source it makes the CO2 laser which produces the plasma in Cymer's EUV source. Ushio does make a EUV source but thats not for manufacturing, its for inspection. The power difference itself should tell you that its a different ball game entirely.