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Cymer is not the only company producing EUV sources. There are some Japanese companies that do produce them too, (e.g. Ushio). And ASML itself uses Trumpf's (Ge
by pa7x1 5y ago
Cymer is not the only company producing EUV sources. There are some Japanese companies that do produce them too, (e.g. Ushio). And ASML itself uses Trumpf's (Germany) lasers instead of Cymer.
https://www.laserfocusworld.com/blogs/article/14039015/how-does-the-laser-technology-in-euv-lithography-work https://www.laserfocusworld.com/blogs/article/14039015/how-d...
- newswasboring 5y agoTrumpf doesn't make the EUV source it makes the CO2 laser which produces the plasma in Cymer's EUV source. Ushio does make a EUV source but thats not for manufacturing, its for inspection. The power difference itself should tell you that its a different ball game entirely.