The proper yield comparison for TSV wouldn't be against the one-chip, less-stuff version, though. It'd be against what you'd have to do to achieve the same capa

The proper yield comparison for TSV wouldn't be against the one-chip, less-stuff version, though. It'd be against what you'd have to do to achieve the same capacities without TSV: a multiplication of the number of mask layers per chip, to produce a single extremely "tall" chiplet. That'd be an extremely low-yield process (which is why nobody's doing it.)