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I was wondering the same exact thing. Wouldnt this be very helpful for EUV masks?
by syntaxing 5y ago
I was wondering the same exact thing. Wouldnt this be very helpful for EUV masks?
- ta988 5y agoYes that's pretty similar to what is used. Each mask takes days to get simulated. It is getting "old" but this great video is covering it https://youtu.be/NGFhc8R_uO4 https://youtu.be/NGFhc8R_uO4