5 ms·
> Did you read the article? I did > There are 2 cleanrooms. The 2nd story one is undamaged but needs the 1st story one to be repaired (I assume it's a structu
by baybal2 6y ago
> Did you read the article?
I did
> There are 2 cleanrooms. The 2nd story one is undamaged but needs the 1st story one to be repaired (I assume it's a structural thing?).
I don't believe they have multiple clean floors.
Fabs are usually done with space below the clean floor being where machinery for supply of liquids/gasses is, and space above being used for air handling equipment.
Some have a storage floor, but that's usually it, especially for a smaller fab.
- newswasboring 6y agoSub fabs are not always about liquids/gases etc. Some fabs, especially bigger DUV fabs, use the sub fab to run their lasers so that scanners can be arranged on the track in a sane way. edit: btw, almost all fabs I have seen have multiple clean floors. Even the sub fabs doing only plumbing work would maintain a clean environment. I'm guessing because thats cheaper than maintaining the interface which goes from clean to unclean environments.
- baybal2 6y agoDo you mean multiple tool floors/litho line floors?
- newswasboring 6y agoTSMC even has litho lines in separate buildings. Its not that uncommon.