multipatterning DUV will get you up to a point if thats what you were asking. You cant reach 5nm with that. (if that were possible you wouldnt see everyone jump

multipatterning DUV will get you up to a point if thats what you were asking. You cant reach 5nm with that. (if that were possible you wouldnt see everyone jumping on ASMLs euv bandwagon) As for lightsource, sure, that was/is a US company, but there's a lot more to a machine then just the light source.