4 ms·
What do you mean "silicon with germanium and dopants"? Implanting germanium as a dopant is already done at much larger geometries than 2/3nm. It's also not an
by j_walter 6y ago
What do you mean "silicon with germanium and dopants"? Implanting germanium as a dopant is already done at much larger geometries than 2/3nm. It's also not any more hazardous than implanting any other ion.