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Cymer seems to only do DUV light sources, the EUV stuff is developed by Trumpf and Zeis in Germany.
by calaphos 6y ago
Cymer seems to only do DUV light sources, the EUV stuff is developed by Trumpf and Zeis in Germany.
- trynumber9 6y ago"ASML San Diego is responsible for the R&D and manufacturing of EUV light sources for lithography systems. Cymer focuses on DUV light sources." From ASML's website. ASML San Diego was part of their joint research before acquisition.