This question doesn't make sense, both options involve designing the thing. Anyway, it's not even about designing it. The technology had to be invented first.

This question doesn't make sense, both options involve designing the thing. Anyway, it's not even about designing it. The technology had to be invented first. It would be crazy to use exploding metal drops in a vacuum chamber where you want to manufacture microchips if there were any other options but there were zero options before. There are few applications of EUV in general, and currently only one at those luminosity levels. So R&D is a big component here, not just manufacturing. And even if we only look at the manufacturing part, this isn't some "simple" vacuum chamber gadget either, only ~30 machines were built last year and they cost more than 100M$ each. For comparison, four of these cost as much as one Wendelstein-7X. This is more of a big, barely productized science project shipped out as soon as it works just good enough for the chip manufacturers.