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The previous top model NXE:3400B, "weighs 180 tons and needs 20 trucks or three fully loaded Boeing 747s for shipment. The price tag is $120 million." [1] [1]

The previous top model NXE:3400B, "weighs 180 tons and needs 20 trucks or three fully loaded Boeing 747s for shipment. The price tag is $120 million." [1] [1] https://www.laserfocusworld.com/blogs/article/14039015/how-does-the-laser-technology-in-euv-lithography-work#:~:text=The%20current%20top%20model%2C%20the,resolution%20down%20to%2013%20nm https://www.laserfocusworld.com/blogs/article/14039015/how-d....

tape_measure 6y ago
That's ~$.66/g. A car at that price would be around $1M.
Nokinside 6y ago
Most of that is packaging, seriously. The purity requirements and vibrational limits for those parts are very high. ASML has plans to get into sub 1nm level. 2nm and 1.5 nm is already in the pipeline. The technology high-NA EUV (high Numerical Aperture Extreme Ultraviolet) becomes just insane. Mirror manufacturing process requires atomic scale corrections and the whole metrology is moved into vacuum. The limit for mass production is measuring and calibration. The measurement accuracy is comparable or exeeding Large Hadron Collideror gravitational-wave astronomy. The speed (wafers per hour) must eventually slow down, requiring more machines and making the process more expensive. Then Moore's law finally dies due to the cost.
- jlokier 6y ago
  > The measurement accuracy is comparable or exeeding [..] gravitational-wave astronomy A nitpick: You are greatly underestimating the precision in gravitational-wave astronomy. ASML's atomic scale corrections are approximately one billion times larger than the fraction-of-a-proton's width displacements measured by LIGO. From https://www.ligo.caltech.edu/page/facts https://www.ligo.caltech.edu/page/facts: > At its most sensitive state, LIGO will be able to detect a change in distance between its mirrors 1/10,000th the width of a proton! This is equivalent to measuring the distance to the nearest star (some 4.2 light years away) to an accuracy smaller than the width of a human hair.
  - mafuy 6y ago
    That's insane! Thanks for sharing
- BlueTemplar 6y ago
  I was wondering how much farther down they could theoretically go : Typical Si-Si bond length is actually only 0.24 nm !

tape_measure 6y ago

That's ~$.66/g. A car at that price would be around $1M.

Nokinside 6y ago

Most of that is packaging, seriously. The purity requirements and vibrational limits for those parts are very high. ASML has plans to get into sub 1nm level. 2nm and 1.5 nm is already in the pipeline. The technology high-NA EUV (high Numerical Aperture Extreme Ultraviolet) becomes just insane. Mirror manufacturing process requires atomic scale corrections and the whole metrology is moved into vacuum. The limit for mass production is measuring and calibration. The measurement accuracy is comparable or exeeding Large Hadron Collideror gravitational-wave astronomy. The speed (wafers per hour) must eventually slow down, requiring more machines and making the process more expensive. Then Moore's law finally dies due to the cost.

jlokier 6y ago
> The measurement accuracy is comparable or exeeding [..] gravitational-wave astronomy A nitpick: You are greatly underestimating the precision in gravitational-wave astronomy. ASML's atomic scale corrections are approximately one billion times larger than the fraction-of-a-proton's width displacements measured by LIGO. From https://www.ligo.caltech.edu/page/facts https://www.ligo.caltech.edu/page/facts: > At its most sensitive state, LIGO will be able to detect a change in distance between its mirrors 1/10,000th the width of a proton! This is equivalent to measuring the distance to the nearest star (some 4.2 light years away) to an accuracy smaller than the width of a human hair.
- mafuy 6y ago
  That's insane! Thanks for sharing
BlueTemplar 6y ago
I was wondering how much farther down they could theoretically go : Typical Si-Si bond length is actually only 0.24 nm !