The EUV source inside ASML's lithography machines is from the German optics company Zeiss, and the lasers used in that system which generates EUV wavelength lig

The EUV source inside ASML's lithography machines is from the German optics company Zeiss, and the lasers used in that system which generates EUV wavelength light by bombarding tin droplets is also from another German company, Trumpf.