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A quick Google search suggests ASML bought Cymer for the patent portfolio, while the tech didn't quite pan out. It seems like Trumpf is the current supplier of
by formerly_proven 6y ago
A quick Google search suggests ASML bought Cymer for the patent portfolio, while the tech didn't quite pan out. It seems like Trumpf is the current supplier of the EUV source.
- tarlinian 6y agoThis is most definitely not true. Trumpf makes CO2 lasers which are used by Cymer to produce EUV radiation via excitation of liquid tin droplets.