Cymer was apprently the first to produce a EUV light source but their lasers were not commercial viable. Trumpf lasers are used in the commercial EUV machines.

Cymer was apprently the first to produce a EUV light source but their lasers were not commercial viable. Trumpf lasers are used in the commercial EUV machines. https://www.laserfocusworld.com/blogs/article/14039015/how-does-the-laser-technology-in-euv-lithography-work https://www.laserfocusworld.com/blogs/article/14039015/how-d...