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Do you have a reference? AFAIK it's 2 other German companies that are key in the production of EUV photolitography machines; Zeiss for the lenses and Trumpf for
by pa7x1 6y ago
Do you have a reference? AFAIK it's 2 other German companies that are key in the production of EUV photolitography machines; Zeiss for the lenses and Trumpf for the lasers.
I see reference for a company bought by ASML in California, HMI. They were bought in 2016 but the development of EUV technology predates it by many years so I find it unlikely that it had an important role in it.
- ju-st 6y agoCymer was apprently the first to produce a EUV light source but their lasers were not commercial viable. Trumpf lasers are used in the commercial EUV machines. https://www.laserfocusworld.com/blogs/article/14039015/how-does-the-laser-technology-in-euv-lithography-work https://www.laserfocusworld.com/blogs/article/14039015/how-d...