Apparently first EUV prototypes were shipped to TSMC for R&D in 2010(!). ASML has a timeline of the company and technology development[1]. [1]https://www.asml

Apparently first EUV prototypes were shipped to TSMC for R&D in 2010(!). ASML has a timeline of the company and technology development[1]. [1]https://www.asml.com/en/company/about-asml/history https://www.asml.com/en/company/about-asml/history