It's not uncommon for different components to scale differently. They're often literally made out of different metals that have different resistance characteri

It's not uncommon for different components to scale differently. They're often literally made out of different metals that have different resistance characteristics at different wire gauges, for example. Interconnects was a very famous case, but many aspects of electrical engineering change when you get that small, because hey if you shrink the diameter of a wire by half guess what happens to the volume. Semiconductor engineering is the field of dealing with a thousand of these tiny problems, and an improvement in the photolithography wavelengths is actually an abstraction of solving the thousands of tiny problems involved with all the different materials.