Your semantic prescription does not seem to be the common semantic prescription in electrical engineering. MEMS seems to be typically called solid state for the

Your semantic prescription does not seem to be the common semantic prescription in electrical engineering. MEMS seems to be typically called solid state for the reasons mentioned by OP. Example in practice (second paragraph): https://www.analog.com/en/technical-articles/mems-accelerometers-for-condition-monitoring.html# https://www.analog.com/en/technical-articles/mems-accelerome...