3 ms·
Can you combine EUV with double patterning?
by jules 6y ago
Can you combine EUV with double patterning?
- brennanpeterson 6y agoYes, and I believe TSMC does. Because the dose scales as resolution to the 4th power (or so), it is better to double pattern than to try to single pattern at massive dose. There are also cases where double patterning can reduce defects in self aligned schemes.
- bob1029 6y agoOne of the major points of EUV is to avoid the need for this kind of thing in the first place.