TSMC's original 7nm process 7FF did not use EUV. They did introduce EUV for certain layers in N7+, their "second generation" 7nm process. Don't confuse N7+ with

TSMC's original 7nm process 7FF did not use EUV. They did introduce EUV for certain layers in N7+, their "second generation" 7nm process. Don't confuse N7+ with N7P, the performance-improved version of 7FF.... There's more information at https://fuse.wikichip.org/news/2567/tsmc-talks-7nm-5nm-yield-and-next-gen-5g-and-hpc-packaging/ https://fuse.wikichip.org/news/2567/tsmc-talks-7nm-5nm-yield... or https://community.cadence.com/cadence_blogs_8/b/breakfast-bytes/posts/tsmc-may-2020 https://community.cadence.com/cadence_blogs_8/b/breakfast-by... . (This is why I always try to give the full name of the process, in as much specificity as I know it; it's very easy to talk at cross purposes about N7+ and N7P despite them being quite different.)