Do you have some articles on this? I read one article[1] which indicated 22nm with a cheap EUV lamp, but that's not cutting edge. 1. https://www.ww01.net/en/ar

Do you have some articles on this? I read one article[1] which indicated 22nm with a cheap EUV lamp, but that's not cutting edge. 1. https://www.ww01.net/en/archives/62932 https://www.ww01.net/en/archives/62932