Batch here is the key. One can make 100-10'000 elements at the same time. This using the same equipment and processes that is used for fabrication of other MEMS

Batch here is the key. One can make 100-10'000 elements at the same time. This using the same equipment and processes that is used for fabrication of other MEMS sensors, techniques that are proven to deliver sub-dollar end-user costs for high performance microphones, accelerometers, temperature sensors, etc.