Sounds like a reason to pick the Free-electron laser pathway back up. Particle accelerators are arguably more of a commodity than ASML's EUV exposure technology

Sounds like a reason to pick the Free-electron laser pathway back up. Particle accelerators are arguably more of a commodity than ASML's EUV exposure technology. And they might get nice introspection by operating an x-ray FEL to do coherent transmission imaging for analytical purposes.