I remember them developing an EUV lithography rig at the ALS 11 bend magnet in the 90s... guess it never worked out. Looking at the website: dude's still there!

I remember them developing an EUV lithography rig at the ALS 11 bend magnet in the 90s... guess it never worked out. Looking at the website: dude's still there! Thanks for the explanation; close enough to ELI5