DUV for lithography is usually produced with excimer lasers at 248 or 193 nm. While they are technically lasers, they are barely coherent and have horrible beam

DUV for lithography is usually produced with excimer lasers at 248 or 193 nm. While they are technically lasers, they are barely coherent and have horrible beam quality. For other applications such as sterilization or curing adhesives, mercury vapor lamps and LEDs are popular.