No, its in addition. There are micro-clean environments inside the tools themselves. The wafer chamber is a couple of orders of magnitude clean. The plastic box

No, its in addition. There are micro-clean environments inside the tools themselves. The wafer chamber is a couple of orders of magnitude clean. The plastic box that carries 15-20 wafers has to be specially made for cleanliness, each piece costing thousands of dollars. Entegris makes these boxes too [1]. [1] https://www.entegris.com/shop/en/USD/Products/Wafer-Handling/Wafer-Processing/300-mm-Front-Opening-Unified-Pods-%28FOUPs%29/c/300mmfrontopeningunifiedpodsfoups https://www.entegris.com/shop/en/USD/Products/Wafer-Handling...