3 ms·

Not much actually (I've worked in a fab), the entire floor is porous to allow air through it and fab HVAC systems attempt to create laminar flow from top to bot

• hinkley 7y ago
  That is seriously cool. Does that reduce the need for protective equipment to keep dander and dust from getting everywhere or is this strictly in addition? My sense of how destructive dust can be in these facilities may be inflated. I'd heard that re-establishing a clean room can be a huge PITA and the first thing I could think of was powders getting in there. If you're ordering your people to destroy equipment, you could turn off the air handlers first, right? You're not gonna be in there long enough for the CO2 to build up to harmful levels. Unfortunately I don't recognize most of those acronyms. Are they dealing with fumes as well?
  • spectramax 7y ago
    No, its in addition. There are micro-clean environments inside the tools themselves. The wafer chamber is a couple of orders of magnitude clean. The plastic box that carries 15-20 wafers has to be specially made for cleanliness, each piece costing thousands of dollars. Entegris makes these boxes too [1]. [1] https://www.entegris.com/shop/en/USD/Products/Wafer-Handling/Wafer-Processing/300-mm-Front-Opening-Unified-Pods-%28FOUPs%29/c/300mmfrontopeningunifiedpodsfoups https://www.entegris.com/shop/en/USD/Products/Wafer-Handling...