3 ms·
Go through the lithoguru class notes on YouTube to learn. Some stuff. There are some nice talks from Kellin Kuhn or Dick James that have good detail. If.you ar
by brennanpeterson 7y ago
Go through the lithoguru class notes on YouTube to learn. Some stuff. There are some nice talks from Kellin Kuhn or Dick James that have good detail.
If.you are visual, Coventor has some nice visualizations. And I really like the work from Nikonov and Young.
If you really.want to get into the ideas, the series.of.papers and notes on E-tau scaling rules are great. Maybe not complete, but good.
Ideas for density aren't too hard: shrink pitch and fold into the z dimension. 3DNand is a folded NAND string, after all.
On materials, it really is driven by etch and lithography (collectively, patterning). Mostly not materials themselves.