The main source is WikiChip. It appears that the wiki is edited by the people who work in the industry and has a lot of information that seems to be fairly reli

The main source is WikiChip. It appears that the wiki is edited by the people who work in the industry and has a lot of information that seems to be fairly reliable. Unfortunately, it rarely has in-line citation to its primary sources, but still a good source. Read, * 14 nm lithography process https://en.wikichip.org/wiki/14_nm_lithography_process https://en.wikichip.org/wiki/14_nm_lithography_process * 10 nm lithography process https://en.wikichip.org/wiki/10_nm_lithography_process https://en.wikichip.org/wiki/10_nm_lithography_process Other sources include: * Life at 10nm. (Or is it 7nm?) And 3nm Views on Advanced Silicon Platforms https://www.eejournal.com/article/life-at-10nm-or-is-it-7nm-and-3nm/ https://www.eejournal.com/article/life-at-10nm-or-is-it-7nm-... * A Brief History of Process Node Evolution https://www.design-reuse.com/articles/43316/a-brief-history-of-process-node-evolution.html https://www.design-reuse.com/articles/43316/a-brief-history-... * 14nm, 7nm, 5nm: How low can CMOS go? It depends if you ask the engineers or the economists… https://www.extremetech.com/computing/184946-14nm-7nm-5nm-how-low-can-cmos-go-it-depends-if-you-ask-the-engineers-or-the-economists https://www.extremetech.com/computing/184946-14nm-7nm-5nm-ho... * Is Intel Really Starting To Lose Its Process Lead? 7nm Node Slated For Release in 2022 https://wccftech.com/intel-losing-process-lead-analysis-7nm-2022/ https://wccftech.com/intel-losing-process-lead-analysis-7nm-... You get dig deeper using these links. And don't ask me why I'm just copy & paste Wikipedia citations. I added those citations...