Take a look at the image in the article here which lists approximate gate and metal pitch sizes as well as showing cell layout at each process node: https://www

Take a look at the image in the article here which lists approximate gate and metal pitch sizes as well as showing cell layout at each process node: https://www.eetimes.com/document.asp?doc_id=1333109 https://www.eetimes.com/document.asp?doc_id=1333109 Note that the structure of transistors has changed over time so that the relation of feature size to transistor capability has also changed over time; see the "Beyond the FinFET: Moving to Gate-All-Around" section here https://www.anandtech.com/show/14333/samsung-announces-3nm-gaa-mbcfet-pdk-version-01 https://www.anandtech.com/show/14333/samsung-announces-3nm-g...