2 ms·
Well, electron (X-ray) lithography is possible, EBL, one step beyond EUV, it is slow and used to make masks today. Extremely hard to make economical though.
by AstralStorm 7y ago
Well, electron (X-ray) lithography is possible, EBL, one step beyond EUV, it is slow and used to make masks today.
Extremely hard to make economical though.