It depends on what you mean. Typically you cannot get away from HF for the etching process but you definitely can replace the whole process with plasma etch/dep

It depends on what you mean. Typically you cannot get away from HF for the etching process but you definitely can replace the whole process with plasma etch/dep. Full plasma etch/dep fab line isn't really scalable and doesn't create optimal uniformity or layer thickness. But for a project like this, it's definitely doable minus the cost prohibitive equipment.