5 ms·
The electrostatic chuck is a common way to hold silicon wafers in chip fab machines. https://www.sandia.gov/LabNews/LN03-27-98/chuck_story.html https://www.san
by opwieurposiu 8y ago
The electrostatic chuck is a common way to hold silicon wafers in chip fab machines.
https://www.sandia.gov/LabNews/LN03-27-98/chuck_story.html https://www.sandia.gov/LabNews/LN03-27-98/chuck_story.html