4 ms·
EUV is truly amazing in that it works at all. The shot noise is simple to fix in theory - just get more photons. In practice, it's going to be really challengin
by BostonEnginerd 8y ago
EUV is truly amazing in that it works at all. The shot noise is simple to fix in theory - just get more photons. In practice, it's going to be really challenging to get more light out of the molten tin droplets.
- Itsdijital 8y agoIIRC the efficiency is hilariously bad. It's something like 100W of EUV light takes 1,000,000W (1MW) to produce.
- wbl 8y agoFree electron lasers didn't pan out?
- baybal2 8y agoNot yet, 1 megawatt death ray is more economical than a freaking cyclotron+fel combo for now.
- baybal2 8y agoEfficiencies did increased like 10 times since the time of first experimental machines, yet even that got EUV just to the level of barely usable. So you still need the multi-megawatt death ray as a primary light source for a fab scale use.
- smueller1234 8y agoI did an internship for one of the two big lithography optics companies back in 2005 in their R&D. Their engineers and scientists working on EUV were very cynical about the EUV prospects. Some of that will have been because switching from tech you understand (lenses) to something you don't (mirrors). But wow, did they NOT think that was going to work.
- AceJohnny2 8y agoQED It's hard to change company culture.