5 ms·
Well the solution is simple: use longer exposures, of course, that has the unpleasant side effect of annihilating your throughput on extremely expensive machine
by deepnotderp 8y ago
Well the solution is simple: use longer exposures, of course, that has the unpleasant side effect of annihilating your throughput on extremely expensive machines...
- monocasa 8y agoI've heard it's something like 2.5x longer exposure, which might negate the benefits of the newer process in the first place. : \
- deepnotderp 8y agoYep Octa patterning? ;)
- BostonEnginerd 8y agoTime to buy ASML stock. ;-)
- skavi 8y agoSo is ASML a monopoly? I was curious some time ago, and couldn't find any other lithography machine manufacturer that could really compete. I had previously assumed Intel made their own stuff, but nope, ASML there as well.
- pas 8y agoWhy? The whole fab becomes 2.5x slower?
- monocasa 8y agoIt becomes a bottleneck, yes.
- BostonEnginerd 8y agoEUV is truly amazing in that it works at all. The shot noise is simple to fix in theory - just get more photons. In practice, it's going to be really challenging to get more light out of the molten tin droplets.
- Itsdijital 8y agoIIRC the efficiency is hilariously bad. It's something like 100W of EUV light takes 1,000,000W (1MW) to produce.
- wbl 8y agoFree electron lasers didn't pan out?
- baybal2 8y agoNot yet, 1 megawatt death ray is more economical than a freaking cyclotron+fel combo for now.
- baybal2 8y agoEfficiencies did increased like 10 times since the time of first experimental machines, yet even that got EUV just to the level of barely usable. So you still need the multi-megawatt death ray as a primary light source for a fab scale use.
- smueller1234 8y agoI did an internship for one of the two big lithography optics companies back in 2005 in their R&D. Their engineers and scientists working on EUV were very cynical about the EUV prospects. Some of that will have been because switching from tech you understand (lenses) to something you don't (mirrors). But wow, did they NOT think that was going to work.
- AceJohnny2 8y agoQED It's hard to change company culture.