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I figured they'd have done X-ray etching long before now, but somehow they squeezed a lot of life out of UV.
by astrodust 8y ago
I figured they'd have done X-ray etching long before now, but somehow they squeezed a lot of life out of UV.
- simcop2387 8y agoMy understanding is that with X-ray etching/lithography it's significantly more difficult to produce the coherent beam and also to do the focusing of it through a masking plate so you can etch a whole wafer at one time. That's the main reason that they've been working on EUV because they can produce a coherent pulse and focus it more easily. For X-rays you have to turn it into a diffraction grating to make the mask and that ends up more difficult to produce (probably not impossible but much more difficult).