3 ms·
The purpose is to deal with the fact individual features are smaller than the wavelength of light used for the photo resist process. I'm not up to speed on the
by slededit 8y ago
The purpose is to deal with the fact individual features are smaller than the wavelength of light used for the photo resist process.
I'm not up to speed on the details of why we can't just use X-Rays but apparently its a difficult problem.
- paulmd 8y agoNot an expert here but it's not trivial to generate the amount of energy needed at those frequencies, and you also need to generate enough photons (not just high-enough energy photons) that shot noise doesn't become a problem too.