From the article: "The chips that produce an electric field for the Solar Probe Cup are made from tungsten, a metal with the highest known melting point of 6,1

From the article: "The chips that produce an electric field for the Solar Probe Cup are made from tungsten, a metal with the highest known melting point of 6,192 F (3,422 C). Normally lasers are used to etch the gridlines in these chips—however due to the high melting point acid had to be used instead." I had no idea tungsten was used to make ICs. What kind of density is achieved by laser etching (on tungsten or otherwise)?