To add to other answers, at both GlobalFoundries and TSMC: - 7nm has have very limited extreme ultraviolet patterning on larger features of the chip - 7nm+ wi

To add to other answers, at both GlobalFoundries and TSMC: - 7nm has have very limited extreme ultraviolet patterning on larger features of the chip - 7nm+ will have significantly more EUV patterning which will allow shrinking some stuff that wasn't for 1st process iteration because yields would be too low - should have slightly higher density, possibly higher clocks/lower power draw.