Instead of using all these dangerous chemicals, can you use use an alternative like Ion Beam Etch (IBE) or some sort of plasma etching system (given that a pers

Instead of using all these dangerous chemicals, can you use use an alternative like Ion Beam Etch (IBE) or some sort of plasma etching system (given that a person can build one and has the money for everything like turbopumps and grids)? Or is it mandatory to use something like HF to etch?