You do not need a cleanroom, just some laminar airflow to prevent dust contamination. That is easy to achieve with a bunch of fans and lab clothing. Static ele

You do not need a cleanroom, just some laminar airflow to prevent dust contamination. That is easy to achieve with a bunch of fans and lab clothing. Static electricity damage is prevented by grounding everything. (Important during lithography.) The hard part is getting a reliable plasma oven and the requisite chemicals plus running the process to reliability.