3 ms·
1. Not really 7nm, only the fin width is ~7nm, metals, etc are more like 54nm. 2. Immersion lithography (water as refractive index) + multiple patterning + com
by deepnotderp 9y ago
1. Not really 7nm, only the fin width is ~7nm, metals, etc are more like 54nm.
2. Immersion lithography (water as refractive index) + multiple patterning + computational lithography.