3 ms·
What kind of CVD/PVD process do you use to achieve those kinds of tolerances? Or is the trick to use protect/deprotect steps like in conventional chemistry?
by jjoonathan 9y ago
What kind of CVD/PVD process do you use to achieve those kinds of tolerances? Or is the trick to use protect/deprotect steps like in conventional chemistry?
- deepnotderp 9y agoALD is commonly used for these ultra fine tolerances.