3 ms·
In the biz people already measure some widths as "monolayers", which refers to a single layer of atoms. Some process features have error margins of less than a
by Tuna-Fish 9y ago
In the biz people already measure some widths as "monolayers", which refers to a single layer of atoms. Some process features have error margins of less than a monolayer -- that is, a dieletric needs to be 4 monolayers thick, and if it only has 3, the device is going to short, and if it has 5, the device will not work.
- jjoonathan 9y agoWhat kind of CVD/PVD process do you use to achieve those kinds of tolerances? Or is the trick to use protect/deprotect steps like in conventional chemistry?
- deepnotderp 9y agoALD is commonly used for these ultra fine tolerances.