Just skimming through those pictures, but most of the fairly complex mechanical parts, at least the ones which have scales, seem to be of the order of 10-100um.

Just skimming through those pictures, but most of the fairly complex mechanical parts, at least the ones which have scales, seem to be of the order of 10-100um. Not sure what would actually constitute nanotech there, but certainly the minimum feature size (spacing of teeth on a gear, etc) is probably <1um, which would count in my book.